Flexible Electronics News

Imec, EVG Demonstrate 1.8µm Pitch Overlay Accuracy for Wafer Bonding

Breakthrough results pave way to multi-layer 3D ICs with high density interconnects.

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By: DAVID SAVASTANO

Editor, Ink World Magazine

At the 2017 European 3D Summit in Grenoble (Jan. 23-25), imec and EV Group (EVG), a leading supplier of wafer-bonding equipment, announce an extension to their collaboration, achieving excellent wafer-to-wafer overlay accuracy results in both hybrid bonding and dielectric bonding.   Expanding this collaboration, EVG will become a partner in imec’s 3D integration program through a joint development agreement to further improve overlay accuracy in wafer-to-wafer bonding.   Wafer-to-wafer bondi...

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